Wafer Handling
Wafer Handler
High-throughput/high-reliability random
access cylindrical coordinate system robot
Features
- Reliability proven in over a decade of process applications?10,000 hour MTBF
- Real-time force-sensing on all axes for operator and wafer safety
- Cleanliness surpassing Class 1
- Unmatched throughput, precision, reliability
- Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence
- Integral or off-axis prealigner/barcode reader
- Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil
- Available 3″ to 8″ wafer capacity with no electromechanical changeovers
- Integrates with Kensington?s extensive architecture of automation equipment?you can
construct tightly integrated, supportable automated systems economically