Performix™ Equipment Front-End Module
Extend the life of your EFEM Module and ensure your Performix’s reliability and exceptional throughput with service options that include:
- Detailed trouble shooting, problem resolution, repair and performance optimization
- Individual component repair: Kensington Robot; Wafer Aligner; M4000 controller
- Reconditioning services
Kensington’s Certificate of Conformance ensures your Kensington Performix™ EFEM is meticulously tested and returned to original operating specifications.