WFH - Wafer Handling Robot
High-throughput/high-reliability random access cylindrical coordinate system Wafer Handling Robot
Features – Wafer Handling Robot WFH Series
- Reliability proven in over two decades of semiconductor equipment wafer handler applications – 10,000 hour MTBF
- Real-time force-sensing on all axes for operator and wafer safety
- Cleanliness surpassing Class 1, semiconductor equipment requirements
- Wafer handler robot with unmatched throughput, precision, reliability
- Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence
- Integral or off-axis prealigner/barcode reader
- Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil
- Available 3″ to 8″ semiconductor wafer capability with no electromechanical change overs
- Integrates with Kensington’s extensive architecture of precision motion control equipment – you can
- construct tightly integrated, supportable automated wafer handling robot systems economically