Meet your 300mm Automation Partner
Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most reliable and cost-effective atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership.
Advanced Robotics Technologies
PATENTED EDGE GRIP TECHNOLOGY
Kensington Laboratories’ exclusive patented edge grip technology is a prime example of our technology leadership in automation systems. Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination. Our field proven edge grip technology enables our 300mm robots to provide true edge grip, virtually eliminating the potential for defects due to particulate generation and improving your process yields. Which translates into reduced overall cost of ownership for your system. Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss. Kensington Laboratories’ failsafe design maintains its grip on the wafer, even when the wafer is being held in an inverted or a vertical position.
• Patented Edge Grip Technology
• Patented Automated Self-Teaching Sy s Continuous Rotation Capability
• State-Of-The-Art Motion Control
• Ca Machine Tool Quality Construction
• High-Resolution Optical Encoders on
PATENTED SELF-TEACH SYSTEM
The advantage of our self-teaching system begins with its installation. An expert technician is required to teach other robotics systems, a time-consuming process taking many hours, perhaps days. With its built-in sensor, a Kensington robot is capable of “seeing” and measuring its environment and performing an automated self teach.
In effect putting an automation expert inside the system itself, reducing the time required to bring the system online and providing for easy interchangeability of our robots. Possibly more important to your ultimate success, the self-teach feature also gives you the ability to rapidly and effectively scale your production and support capabilities.
INTEGRATED TRANSMISSIVE OPTICAL SENSOR
An eye-safe LED is integrated into the robot end effector and provides the robot with superior sensing capabilities. Allowing the robot to not only accurately map the location and presence of wafers in a cassette, but also to detect common errors, such as missing, doubled, or cross-slotted wafers.
Built-in sensor technology, enables the robot to measure its environment, providing the robot with the wafer’s elevation and edge locations. The robot then precisely calculates the wafer’s center, allowing it to adjust automatically for any potential misalignment of the wafer before moving in to pick it up.
• Integrated Transmissive Beam Wafer Mapping
• Advanced Wafer Cassette Error Detection
• Direct Drive Technology pable of Controlling Multiple Robots
• Off Center Pick And Place Capability
• Advanced Failsafe Wafer Handling Features All Axes
• Reduced Wear Z Axis Counter Balance
• Superior Linear Track Systems
• Wet Robot Options
STANDARD ATMOSPHERIC ROBOT PLATFORMS
Kensington Laboratories’ atmospheric robots are designed to the most rigorous performance standards. Its machine tool quality construction and the meticulous selection of its long-life components contribute to our robots unsurpassed reliability and performance. Our modular design and patented self-teaching capability allow our robots to be used both in new systems and as a drop-in field replaceable unit (FRU) in existing systems. Our attention to detail and our focus on performance and reliability ensure our robots provide the highest throughput and lowest cost of ownership available.
Configurations and Options
Our advanced Multi-Link reach design utilizes a superior field-tested and proven Direct Drive system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing when an object is stuck and halting motion to prevent further damage.
Our robots are designed to provide wafer handling operations within a very compact footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected.
Z TRAVEL OPTIONS
Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of applied force. This reduces long-term wear and maintains a high degree of positional
accuracy throughout the life of the robot.
Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.
Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.
The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability.
Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.
Kensington Laboratories’ standard track solutions provide high acceleration and overall speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered systems. Our track systems can also be equipped with integrated alignment features that assure the locational accuracy of other critical automation elements of the system, such as 300mm pod doors and load ports.
Unlike typical linear motor driven track systems that are incapable of sensing objects and can be extremely dangerous to both operators and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications.
Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements.