Performix™ Equipment Front-End Module

Extend the life of your EFEM Module and ensure your Performix’s reliability and exceptional throughput with service options that include:

  • Detailed trouble shooting, problem resolution, repair and performance optimization
  • Individual component repair: Kensington Robot; Wafer Aligner; M4000 controller
  • Reconditioning services
  • Recertification

Kensington’s Certificate of Conformance ensures your Kensington Performix™ EFEM is meticulously tested and returned to original operating specifications.