access cylindrical coordinate system robot
- Reliability proven in over a decade of process applications?10,000 hour MTBF
- Real-time force-sensing on all axes for operator and wafer safety
- Cleanliness surpassing Class 1
- Unmatched throughput, precision, reliability
- Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence
- Integral or off-axis prealigner/barcode reader
- Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil
- Available 3″ to 8″ wafer capacity with no electromechanical changeovers
- Integrates with Kensington?s extensive architecture of automation equipment?you can
construct tightly integrated, supportable automated systems economically
If attractive cost of ownership and low support costs are key goals in your spec, Kensington Laboratories? wafer handler robot
can enhance the marketability of your tool. Both as an established OEM component and as the heart of our own sorter
tools and defect review workstations, the Kensington robot has compiled a 12-year record of handling accuracy, throughput, cleanliness, and dependability.
Kensington Laboratories? robot is easy to use and support in the field. Commands are high-level, with extensive diagnostic and
recovery intelligence and automatic adaptation to carrier and environmental variances. High-level commands facilitate compact, modular and supportable application code. Comprehensive self-teaching means less than 15 minutes are needed for complete installation, with application information retained in non-volatile memory. All axes integrate optical references (fiducials) that allow precise recovery of your
application?s taught coordinate system on power-up.
Safety was a prime design objective when we engineered these robots. Dual-end effector-paddle versions yield high throughput
via parallel processing of wafers, without requiring potentially hazardous high-speed motions.Safety was a prime design
objective when we engineered these robots. Dual-end effector-paddle versions yield high throughput via parallel
processing of wafers, without requiring potentially hazardous high-speed motions. All axes incorporate real-time force sensing,
protecting the operator and the wafer. An emergency motor shutdown is provided at a BNC connector on the controller back
panel; when this is triggered (or whenever a limit, over-force,
loss of vacuum, or other serious error occurs), all motion will halt
immediately while encoders and logic remain active. Distributed vacuum feedback sensors validate wafer presence and security at
all times, and internal backup maintains vacuum valve states for minutes even after total loss of power. And like all Kensington
automation equipment, our robots surpass Class 1 cleanroom requirements and have been shown to contribute statistically
immeasurable per-pass contamination (@ 0.3?m) and wafer damage.
Reliance on robust, proven mechanical elements, attention to design simplicity and elimination of the need for adjustments and periodic maintenance all contribute to long term accuracy, reliability and supportability, proven over years of production use.
The dependability of Kensington robots is well recognized-our OEM customers often find that choosing Kensington elements for
use in their tool helps enhance its marketability.
Kensington robots use the same Model 4000 Controller that drives all our extensive architecture of process automation equipment, including our positioning stages (available with precisions and bi-directional repeatabilities to 0.01?m/0.5 arc-sec) and cassette scanner/mapper platforms (which measure and compensate for carrier tolerances, automatically ensuring gentle wafer handling through the center of each slot). The system designer can easily and economically devise tightly integrated, reliable and supportable systems of great sophistication. Kensington?s robot is available in configurations with a wide range of custom reaches and Z travels.