Wafer Handling

Wafer Handler

High-throughput/high-reliability random
access cylindrical coordinate system robot

Features

  • Reliability proven in over a decade of process applications?10,000 hour MTBF
  • Real-time force-sensing on all axes for operator and wafer safety
  • Cleanliness surpassing Class 1
  • Unmatched throughput, precision, reliability
  • Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence
  • Integral or off-axis prealigner/barcode reader
  • Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil
  • Available 3″ to 8″ wafer capacity with no electromechanical changeovers
  • Integrates with Kensington?s extensive architecture of automation equipment?you can
    construct tightly integrated, supportable automated systems economically

Contact Kensington for more information