Precision Motion Control Linear Stages

Precision linear motion stages without backlash or hysteresis

Linear MotionLinear StagesXY Stage
Single Axis Stages

Description

Kensington’s precision linear stages have addressed the needs for precision motion control for more than a quarter century. The stages are versatile and used individually, combined in X Y Stage Systems for multiple functions, and integrated to make precision multi-axis X-Y-Z-Θ stages, enabling a wide range of precision motion control applications. Kensington’s precision linear stages position substrates, silicon wafers and photonic devices, quickly with precision and repeatably.

Features

  • Smooth rapid movement immune to linkage backlash
  • Hysteresis and wear eliminated by non-contacting read-head design
  • Real-time force-sensing with programmable soft limits for safe operation
  • EMO features halts motion immediately
  • System initialization not required to restart after EMO
  • Quiet operation without resonances or excessive heat
  • No PID parameter tuning with high step-and-settle performance via mechanical controls and design Easy to use command     structure
  • Resolution of 100nm, 50nm and 25nm
  • Bi-directional repeatability of 200nm, 100nm and 50nm
  • Acceleration: 0.001 to 0.25g
  • Velocity range: 0.01 µm/s to 100 mm/s, top speed of 200 mm/sec
  • Precision Linear Stage Travel Distances
    • Linear– from 1″ (25 mm) to 16″ (400 mm)
    • Vertical – 1″ (25 mm) Mini-Z

Contact Kensington today for technical details and to obtain a quotation for precision linear stages from the precision motion control product portfolio