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Robotics
»Advanced Robotics Technology
»Single Arm Multi Link Robot
»Dual Arm Multi Link Robot
»Wafer Handler
Load Ports & Front Ends
»300mm Load Port
»300mm Load Port with Integrated Wafer Mapping
»300mm Proformix™ EFEM
Pre-Aligners
»Thin Wafer Pre-Aligner
»2" Wafer Pre-Aligner
Linear Motions Solution
»Standard Linear
  • XY Stages
  • Rotary Stages
  • Gantry Systems
»Custom Designed
Motion Controller
»Model 4000 Motion Controller
End Effectors
»End Effector Products

 

Robotics
Reach Configurations – Our advanced Multi Link reach design utilizes a superior field-tested and proven Direct Drive system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing when an object is stuck and halting motion to prevent further damage.


                                                  Dual Arm


Robot Type Standard Reach¹
Single Arm 14 or 21 inch (355.6 or 533.4mm)
Dual Arm 14 inch (355.6mm)

¹without end effector


Working Envelope
– Our robots are designed to provide wafer handling operations within a very compact footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected.

  Type Swept Area¹
System Type Without Wafer With 300mm Wafer
Single Arm 18.34 inch (465.5mm) 22.18 inch (563.4mm)
Single Arm With Wrist 24.48 inch (621.8mm) 26.38 inch (670.1mm)
Dual Arm 20.17 inch (512.3mm) 20.17 inch (512.3mm)

¹using a typical 300mm Edge Grip End Effector—varies with different
end effector sizes and types



Z Travel Options –
Newport robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of applied force. This reduces long-term wear and maintains a high degree of positional accuracy throughout the life of the robot.

 

System Height²

Z Travel¹

14 inch Reach

21 inch Reach

11.25 inch

23.29 inch (591.6mm)

24.94 inch (633.5mm)

14.25 inch

26.94 inch (684.3mm)

27.94 inch (709.7mm)

17.25 inch

29.94 inch (760.5mm)

30.94 inch (785.9mm)


¹ includes High Speed Z and Braking Mechanism
² measured from the bottom of the robot body to the bottom end
effector mounting surface
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