Our Toll Free Number 1-888-977-7800
Request For Quote Or Repair

Home Company News Products Repair Life Sciences Products Services Customer Service Careers Contact Us
Robotics
»Advanced Robotics Technology
»Single Arm Multi Link Robot
»Dual Arm Multi Link Robot
»Wafer Handler
Load Ports & Front Ends
»300mm Load Port
»300mm Load Port with Integrated Wafer Mapping
»300mm Proformix™ EFEM
Pre-Aligners
»Thin Wafer Pre-Aligner
»2" Wafer Pre-Aligner
Linear Motions Solution
»Standard Linear
  • XY Stages
  • Rotary Stages
  • Gantry Systems
»Custom Designed
Motion Controller
»Model 4000 Motion Controller
End Effectors
»End Effector Products

 

300mm FOUP Load Port for Automated Wafer Handling
Kensington Laboratories, LLC, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington Laboratories’ ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network.

    Interoperability: Fully compatible with all SEMI standard FOUPs.

    Cleanliness: ISO Class 1 particle performance when integrated in class 100 or better
      environment.

    Reliability: Robust design combined with precision assembly achieves superior dependability       and lifetime performance.

    Zero Preventative Maintenance: Superior precision design requires no periodic lubrication       or re-alignment.

    Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic       closed-loop servos for precise repeatable motion.

    Wafer Mapping: High performance through-beam wafer mapping option allows fast, accurate       wafer detection.

    Fab Customization: Configurable features include programmable lights, buttons, carrier ID,       and AMHS options.

    Compliance: SEMI, S2, S8, CE, and F47 compliant.

    Bridge Tool: 200mm wafer operation (with insert @10mm pitch).


Specifications:

 

 

 

Wafer size/capacity

300 mm/25

 

 

Load height

900 mm, adjustable ± 10 mm

 

 

Height without carriage

1374 mm

 

 

Width

470 mm

 

 

Depth

591.5 mm

 

 

Weight (with carriage)

Approx. 75 kg

 

 

Noise level @ 1 m

< 62 dB

 

 

FOUP type

SEMI standard E47.1-0697 and E62

 

 

FOUP sensors

Placement and Present

 

 

FOUP load to open time

6.90 sec., 7.95.sec. with mapper

 

 

FOUP load to unload time

5.95 sec., 7.75 sec. with mapper

 

 

FOUP clamping

Active independent center lock

 

 

Docking motion

70 mm

 

 

Reproducibility

< 0.1 mm

 

 

Electronic unit

Microcontroller, Flash Firmware up-loadable

 

 

Communications

Serial, ASCII, 9 pin D-Sub

 

 

Utility Connections

 

 

 

Electrical power supply

96 watt max @ idle, 240 watts peak, 100-240 VAC / 50-60 Hz standard, +24VDC optional

Compressed air (input)

Min. 60 psi, Max. 145 psi (relative) oil-free purified < 5 µm

Consumption

< 1 m3/h for 10 cycles/hour

 

 

Connection

One-touch fitting for 1/4" tubing

 

 

Vacuum

None required

 

 

Cleanliness

ISO Class 1 operation

 

 

 

(when operating in Class 100 or better environment)

 

 

Ambient Conditions

 

 

 

Temperature

Operation: +15 to +25°C (58 to 77°F)

 

 

 

Transport: -25 to +55°C (-13 to 131°F)

 

 

Humidity

Operation: 10% to 95% rel. humidity

 

 

 

Transportation 5% to 95% rel. humidity

 

 

Cleanliness

 

Operation: Class 100 or better on operator side

 

 

Specification Compliance*

 

 

 

E1.9

300 mm Cassette

E64

300 mm Cart Docking

E15.1

300 mm Tool Load Port

E-84

AMHS Parallel I/O Interface

E47.1

300 mm Boxes and Pods

E-99

CIDRW

E57

Kinematic Couplings

F47

Electrical Voltage Sag Standard

E62

300 mm FIMS

S2/S8/S14

Safety Guidelines

E63

BOLTS Interface

CE

EMC, LVD, and MD Directives

Complies to applicable portion of industry standards with some intentional exceptions taken for    improved performance and interoperability.

Specifications are subject to change without notice.

© 2006 Kensington Laboratories, LLC. All rights reserved. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners.

2006 Kensington Laboratories, LLC. All rights reserved. | Links & Publications