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300mm FOUP Load Port for Automated Wafer Handling
Kensington Laboratories, LLC, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington Laboratories’ ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network.
 
Interoperability: Fully compatible with all SEMI standard FOUPs.
Cleanliness: ISO Class 1 particle performance when integrated in class 100 or better environment.
Reliability: Robust design combined with precision assembly achieves superior dependability and lifetime performance.
Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or re-alignment.
Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion.
Wafer Mapping: High performance through-beam wafer mapping option allows fast, accurate wafer detection.
Fab Customization: Configurable features include programmable lights, buttons, carrier ID, and AMHS options.
Compliance: SEMI, S2, S8, CE, and F47 compliant.
Bridge Tool: 200mm wafer operation (with insert @10mm pitch).
| Wafer size/capacity |
300 mm/25 |
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| Load height |
900 mm, adjustable ± 10 mm |
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| Height without carriage |
1374 mm |
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| Width |
470 mm |
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| Depth |
591.5 mm |
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| Weight (with carriage) |
Approx. 75 kg |
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| Noise level @ 1 m |
< 62 dB |
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| FOUP type |
SEMI standard E47.1-0697 and E62 |
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| FOUP sensors |
Placement and Present |
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| FOUP load to open time |
6.90 sec., 7.95.sec. with mapper |
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| FOUP load to unload time |
5.95 sec., 7.75 sec. with mapper |
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| FOUP clamping |
Active independent center lock |
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| Docking motion |
70 mm |
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| Reproducibility |
< 0.1 mm |
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| Electronic unit |
Microcontroller, Flash Firmware up-loadable |
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| Communications |
Serial, ASCII, 9 pin D-Sub |
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| Electrical power supply |
96 watt max @ idle, 240 watts peak, 100-240 VAC / 50-60 Hz standard, +24VDC optional |
| Compressed air (input) |
Min. 60 psi, Max. 145 psi (relative) oil-free purified < 5 µm |
| Consumption |
< 1 m3/h for 10 cycles/hour |
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| Connection |
One-touch fitting for 1/4" tubing |
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| Vacuum |
None required |
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| Cleanliness |
ISO Class 1 operation |
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(when operating in Class 100 or better environment) |
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| Temperature |
Operation: +15 to +25°C (58 to 77°F) |
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Transport: -25 to +55°C (-13 to 131°F) |
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| Humidity |
Operation: 10% to 95% rel. humidity |
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Transportation 5% to 95% rel. humidity |
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| Cleanliness |
Operation: Class 100 or better on operator side |
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| E1.9 |
300 mm Cassette |
E64 |
300 mm Cart Docking |
| E15.1 |
300 mm Tool Load Port |
E-84 |
AMHS Parallel I/O Interface |
| E47.1 |
300 mm Boxes and Pods |
E-99 |
CIDRW |
| E57 |
Kinematic Couplings |
F47 |
Electrical Voltage Sag Standard |
| E62 |
300 mm FIMS |
S2/S8/S14 |
Safety Guidelines |
| E63 |
BOLTS Interface |
CE |
EMC, LVD, and MD Directives |
 Complies to applicable portion of industry standards with some intentional exceptions taken for improved performance and interoperability.
Specifications are subject to change without notice.
© 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners.
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