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Robotics
»Advanced Robotics Technology
»Single Arm Multi Link Robot
»Dual Arm Multi Link Robot
»Wafer Handler
Load Ports & Front Ends
»300mm Load Port
»300mm Load Port with Integrated Wafer Mapping
»300mm Proformix™ EFEM
Pre-Aligners
»Thin Wafer Pre-Aligner
»2" Wafer Pre-Aligner
Linear Motions Solution
»Standard Linear
  • XY Stages
  • Rotary Stages
  • Gantry Systems
»Custom Designed
Motion Controller
»Model 4000 Motion Controller
End Effectors
»End Effector Products

 

End Effectors
Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements.

Wafer Sizes

100mm

125mm

150mm

200mm

and

300mm

Grip Types

Edge Grip and Vacuum Grip


300mm vacuum grip
300mm edge grip
200mm vacuum grip

standard vacuum grip

forked vacuum grip

standard vacuum grip double

   

forked vacuum grip double

   

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