Products Robotics |Pre-Aligners| Wafer Pre-Aligner

Pre-Aligners
Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.

External
Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.

Wafer Sizes	125mm	150mm	200mm	and	300mm
Rational Accuracy	< 2 arc sec
Centration Accuracy	< 0.002 inch (0.051mm)

Integrated
The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability.

Wafer Sizes	125mm	150mm	200mm	and	300mm
Rational Accuracy	< 2 arc sec
Centration Accuracy	< 0.002 inch (0.051mm)