Providing Load-Ports since 2000

Named ‘Best in Class’ by large process OEM

Fastest Throughput (2x faster)

High Reliability:
                Demonstrated MCBF
               > 650,000 cycles
                Calculated MTBF
               > 20,000 hrs
                Zero PM
                Zero Particles

Industry compliance:
                Drop in replacement
                Semi Bolts Compatible

         PRICED UNDER $10,000
                Volume Pricing Available

 Interoperability: Fully compatible with all SEMI standard FOUPs.

 Cleanliness: Better than Class 1 particle performance when integrated in Class 100 or better environment.

 Reliability: Robust design combined with precision assembly achieves superior dependability and lifetime performance.

 Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or re-alignment.

 Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion.

 Wafer Mapping: High performance Break-The-Beam wafer mapping option allows fast, accurate wafer detection.

 Fab Customization: Configurable features include programmable lights, buttons, carrier ID, and AMHS options.

 Compliance*: SEMI, S2, S8, CE, and F47 compliant.
 
 Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch).